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MORDA in the Semiconductor Industry

Jezik EngleskiEngleski
Knjiga Meki uvez
Knjiga MORDA in the Semiconductor Industry Uwe Büttner
Libristo kod: 06815344
Nakladnici VDM Verlag Dr. Mueller E.K., kolovoz 2008
In the course of a feasibility study at the FEOL of §the 300 mm semiconductor Fab of Qimonda Dresden... Cijeli opis
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In the course of a feasibility study at the FEOL of §the 300 mm semiconductor Fab of Qimonda Dresden, a §system for multivariate analysis of time-resolved §raw data originating from wafer processing tools was §instituted. This system called MORDA (Multivariate §Offline Raw Data Analysis) closed the gap §between online Fault Detection and Classification §basing on statistical key numbers, and offline §PCA, PLS and Batch Modelling to diagnose and §classify the root causes of Low Yielding Wafers that §could not be explained by classical FDC.

Informacije o knjizi

Puni naziv MORDA in the Semiconductor Industry
Autor Uwe Büttner
Jezik Engleski
Uvez Knjiga - Meki uvez
Datum izdanja 2008
Broj stranica 96
EAN 9783639059380
ISBN 3639059387
Libristo kod 06815344
Nakladnici VDM Verlag Dr. Mueller E.K.
Težina 141
Dimenzije 152 x 229 x 5

Kategorija

Computing & Information Technology > Information technology: general issues
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