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Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology

Jezik EngleskiEngleski
Knjiga Tvrdi uvez
Knjiga Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology Toshio Ito
Libristo kod: 03020458
Nakladnici Taylor & Francis Inc, lipanj 1998
Explores the science and technology of lithographic processes and resist materials and summarizes in... Cijeli opis
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Explores the science and technology of lithographic processes and resist materials and summarizes innovations in semiconductor manufacturing. This book considers future trends in lithography and resist material technology. It also reviews the interaction of light, electron beams, and X-rays with resist materials.

Informacije o knjizi

Puni naziv Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology
Autor Toshio Ito
Jezik Engleski
Uvez Knjiga - Tvrdi uvez
Datum izdanja 1998
Broj stranica 336
EAN 9780824799519
ISBN 9780824799519
Libristo kod 03020458
Nakladnici Taylor & Francis Inc
Težina 612
Dimenzije 152 x 229 x 22

Kategorija

Technology, Engineering, Agriculture > Industrial chemistry & manufacturing technologies > Industrial chemistry & chemical engineering > Plastics & polymers
Technology, Engineering, Agriculture > Electronics & communications engineering > Electronics engineering > Electronics: circuits & components
Technology, Engineering, Agriculture > Electronics & communications engineering > Electronics engineering > Electronic devices & materials
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