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CMOS Gate-Stack Scaling - Materials, Interfaces and Reliability Implications: Volume 1155

Jezik EngleskiEngleski
Knjiga Meki uvez
Knjiga CMOS Gate-Stack Scaling - Materials, Interfaces and Reliability Implications: Volume 1155 Alexander A. Demkov
Libristo kod: 02439020
Nakladnici Cambridge University Press, lipanj 2014
To address the increasing demands of device scaling, new materials are being introduced into convent... Cijeli opis
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To address the increasing demands of device scaling, new materials are being introduced into conventional Si CMOS processing at an unprecedented rate. Presentations collected here focus on understanding, from a chemistry and materials perspective, the mechanism of interface formation and defects at interfaces, for both conventional Si and alternative channel (Ge or III-V) systems. Several papers address reliability concerns for high-k/metal gate (basic physical models, charge trapping, etc.), while others cover characterization of the thin films and interfaces which comprise the gate stack. Topics include: advanced Si-based gate stacks; and alternate channel materials.

Informacije o knjizi

Puni naziv CMOS Gate-Stack Scaling - Materials, Interfaces and Reliability Implications: Volume 1155
Autor Alexander A. Demkov, Bill Taylor, H. Rusty Harris, Jeffery W. Butterbaugh
Jezik Engleski
Uvez Knjiga - Meki uvez
Datum izdanja 2014
Broj stranica 194
EAN 9781107408326
ISBN 1107408326
Libristo kod 02439020
Nakladnici Cambridge University Press
Težina 27
Dimenzije 152 x 229 x 10

Kategorija

Technology, Engineering, Agriculture > Mechanical engineering & materials > Production engineering > Industrial quality control
Technology, Engineering, Agriculture > Mechanical engineering & materials > Materials science
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