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Atomic Layer Deposition for Semiconductors

Jezik EngleskiEngleski
Knjiga Tvrdi uvez
Knjiga Atomic Layer Deposition for Semiconductors Cheol Seong Hwang
Libristo kod: 01428994
Nakladnici Springer-Verlag New York Inc., listopad 2013
This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, mov...
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This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, moving from the basic chemistry of ALD and modeling of ALD processes to sections on ALD for memories, logic devices, and machines.

Informacije o knjizi

Puni naziv Atomic Layer Deposition for Semiconductors
Autor Cheol Seong Hwang
Jezik Engleski
Uvez Knjiga - Tvrdi uvez
Datum izdanja 2013
Broj stranica 263
EAN 9781461480532
ISBN 1461480531
Libristo kod 01428994
Nakladnici Springer-Verlag New York Inc.
Težina 5384
Dimenzije 155 x 235 x 19

Kategorija

Mathematics & Science > Chemistry > Physical chemistry > Electrochemistry & magnetochemistry
Technology, Engineering, Agriculture > Electronics & communications engineering > Electronics engineering > Electronic devices & materials
Technology, Engineering, Agriculture > Energy technology & engineering > Electrical engineering
Computing & Information Technology > Computer hardware > Storage media & peripherals
Computing & Information Technology > Computer science > Computer architecture & logic design
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